Fundamentals of Microfabrication and Nanotechnology 3rd edition by Marc Madou – Ebook PDF Instant Download/Delivery: 1420055194 , 978-1420055191
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ISBN 10: 1420055194
ISBN 13: 978-1420055191
Author: Marc Madou
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Fundamentals of Microfabrication and Nanotechnology 3rd Table of contents:
Introduction MEMS and NEMS Foundations
Introduction
1 Historical Note: The Ascent of Silicon, MEMS, and NEMS
2 Crystallography
3 Quantum Mechanics and the Band Theory of Solids
4 Silicon Single Crystal Is Still King
5 Photonics
6 Fluidics
7 Electrochemical and Optical Analytical Techniques
Index
Volume 2 Cover
Half Title
Title Page
Copyright Page
Dedication
Table of Contents
Roadmap
Author
Acknowledgments
Part I Lithography
Introduction to Part I
1 Photolithography
2 Next-Generation Lithographies and Lithography Research
Part II Pattern Transfer with Subtractive Techniques
Introduction to Part II
3 Dry Etching
4 Wet Chemical Etching and Wet Bulk Micromachining—Pools as Tools
5 Thermal Energy-Based Removing
6 MechanicalEnergy-Based Removing
Part III Pattern Transfer with Additive Techniques
Introduction to Part III
7 Physical and Chemical Vapor Deposition—Thin Film Properties and Surface Micromachining
8 Chemical, Photochemical, and Electrochemical Forming Techniques
9 Thermal Energy-Based Forming Techniques—Thermoforming
10 Micromolding Techniques—LIGA
Index
Volume 3 Cover
Half title
Title Page
Copyright Page
Dedication
Table of Contents
Roadmap
Author
Acknowledgments
Part I From Traditional Manufacturing to Nanotechnology
Introduction to Part I
1 Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared
2 Nature as an Engineering Guide: Biomimetics
3 Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared
4 Packaging, Assembly, and Self-Assembly
5 Selected Materials and Processes for Mems and Nems
6 Metrology and Mems/Nems Modeling
Part II Scaling Laws, Actuators, and Power and Brains in Miniature Devices
Introduction to Part II
7 Scaling Laws
8 Actuators
9 Power and Brains in Miniature Devices
Part III Miniaturization Application
Introduction to Part III
10 Mems and Nems Applications
Index
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